diff --git a/boards/deprecated.cmake b/boards/deprecated.cmake
index 8887b1b2749..e3812e10261 100644
--- a/boards/deprecated.cmake
+++ b/boards/deprecated.cmake
@@ -384,7 +384,7 @@ set(mimxrt595_evk_cm33_DEPRECATED
     mimxrt595_evk/mimxrt595s/cm33
 )
 set(mimxrt685_evk_cm33_DEPRECATED
-    mimxrt685_evk
+    mimxrt685_evk/mimxrt685s/cm33
 )
 set(mps2_an385_DEPRECATED
     mps2/an385
diff --git a/boards/nxp/mimxrt685_evk/doc/index.rst b/boards/nxp/mimxrt685_evk/doc/index.rst
index daed053fcb2..109dfde16e6 100644
--- a/boards/nxp/mimxrt685_evk/doc/index.rst
+++ b/boards/nxp/mimxrt685_evk/doc/index.rst
@@ -290,7 +290,7 @@ Here is an example for the :ref:`hello_world` application. This example uses the
 
 .. zephyr-app-commands::
    :zephyr-app: samples/hello_world
-   :board: mimxrt685_evk
+   :board: mimxrt685_evk/mimxrt685s/cm33
    :goals: flash
 
 Open a serial terminal, reset the board (press the RESET button), and you should
@@ -309,7 +309,7 @@ Here is an example for the :ref:`hello_world` application. This example uses the
 
 .. zephyr-app-commands::
    :zephyr-app: samples/hello_world
-   :board: mimxrt685_evk
+   :board: mimxrt685_evk/mimxrt685s/cm33
    :goals: debug
 
 Open a serial terminal, step through the application in your debugger, and you
diff --git a/boards/nxp/mimxrt685_evk/mimxrt685_evk.yaml b/boards/nxp/mimxrt685_evk/mimxrt685_evk.yaml
index 53f260fc60e..22ab15ecfd9 100644
--- a/boards/nxp/mimxrt685_evk/mimxrt685_evk.yaml
+++ b/boards/nxp/mimxrt685_evk/mimxrt685_evk.yaml
@@ -4,7 +4,7 @@
 # SPDX-License-Identifier: Apache-2.0
 #
 
-identifier: mimxrt685_evk
+identifier: mimxrt685_evk/mimxrt685s/cm33
 name: NXP MIMXRT685-EVK
 type: mcu
 arch: arm
diff --git a/samples/sensor/fxos8700/README.rst b/samples/sensor/fxos8700/README.rst
index 0c0fa8af66a..3bd1aade447 100644
--- a/samples/sensor/fxos8700/README.rst
+++ b/samples/sensor/fxos8700/README.rst
@@ -117,7 +117,7 @@ Sample can be built and executed for the MIMXRT685-EVK as follows:
 
 .. zephyr-app-commands::
    :zephyr-app: samples/sensor/fxos8700
-   :board: mimxrt685_evk
+   :board: mimxrt685_evk/mimxrt685s/cm33
    :goals: build flash
    :compact:
 
diff --git a/samples/sensor/fxos8700/sample.yaml b/samples/sensor/fxos8700/sample.yaml
index 29215833f63..dbdfe23f9d0 100644
--- a/samples/sensor/fxos8700/sample.yaml
+++ b/samples/sensor/fxos8700/sample.yaml
@@ -16,7 +16,7 @@ tests:
       - rv32m1_vega/openisa_rv32m1/ri5cy
       - twr_ke18f
       - lpcxpresso55s16
-      - mimxrt685_evk
+      - mimxrt685_evk/mimxrt685s/cm33
       - frdm_k22f
       - mimxrt1024_evk
       - mimxrt595_evk/mimxrt595s/cm33
@@ -34,7 +34,7 @@ tests:
       - bbc_microbit
       - lpcxpresso55s69/lpc55s69/cpu0
       - reel_board
-      - mimxrt685_evk
+      - mimxrt685_evk/mimxrt685s/cm33
       - mimxrt595_evk/mimxrt595s/cm33
     integration_platforms:
       - bbc_microbit
diff --git a/samples/sensor/lps22hh_i3c/README.rst b/samples/sensor/lps22hh_i3c/README.rst
index 5e8b1d4dff5..8b96ab51fbe 100644
--- a/samples/sensor/lps22hh_i3c/README.rst
+++ b/samples/sensor/lps22hh_i3c/README.rst
@@ -43,7 +43,7 @@ Building on mimxrt685_evk board
 .. zephyr-app-commands::
    :zephyr-app: samples/sensor/lps22hh_i3c
    :host-os: unix
-   :board: mimxrt685_evk
+   :board: mimxrt685_evk/mimxrt685s/cm33
    :goals: build
    :compact:
 
diff --git a/samples/sensor/lsm6dso_i2c_on_i3c/README.rst b/samples/sensor/lsm6dso_i2c_on_i3c/README.rst
index 872d244364b..4764608bcba 100644
--- a/samples/sensor/lsm6dso_i2c_on_i3c/README.rst
+++ b/samples/sensor/lsm6dso_i2c_on_i3c/README.rst
@@ -34,7 +34,7 @@ Building on mimxrt685_evk board
 .. zephyr-app-commands::
    :zephyr-app: samples/sensor/lsm6dso_i2c_on_i3c
    :host-os: unix
-   :board: mimxrt685_evk
+   :board: mimxrt685_evk/mimxrt685s/cm33
    :goals: build
    :compact:
 
diff --git a/samples/subsys/fs/littlefs/sample.yaml b/samples/subsys/fs/littlefs/sample.yaml
index 183b582e400..b78a070f1c9 100644
--- a/samples/subsys/fs/littlefs/sample.yaml
+++ b/samples/subsys/fs/littlefs/sample.yaml
@@ -11,7 +11,7 @@ tests:
       - nrf52840dk/nrf52840
       - particle_xenon
       - disco_l475_iot1
-      - mimxrt685_evk
+      - mimxrt685_evk/mimxrt685s/cm33
       - mimxrt1060_evk
       - mimxrt1064_evk
       - qemu_x86
diff --git a/soc/nxp/imxrt/imxrt6xx/CMakeLists.txt b/soc/nxp/imxrt/imxrt6xx/CMakeLists.txt
index 7ed2c42c708..d6d242f3c9c 100644
--- a/soc/nxp/imxrt/imxrt6xx/CMakeLists.txt
+++ b/soc/nxp/imxrt/imxrt6xx/CMakeLists.txt
@@ -1,26 +1,9 @@
 #
-# Copyright (c) 2020, NXP
+# Copyright 2024 NXP
 #
 # SPDX-License-Identifier: Apache-2.0
 #
 
-zephyr_include_directories(.)
-
-zephyr_sources(soc.c)
-
-zephyr_sources_ifdef(CONFIG_PM power.c)
-
-zephyr_sources_ifdef(CONFIG_FLASH_MCUX_FLEXSPI_XIP flash_clock_setup.c)
-
-zephyr_library_include_directories(
-  ${ZEPHYR_BASE}/kernel/include
-  ${ZEPHYR_BASE}/arch/${ARCH}/include
-  )
-
-zephyr_compile_definitions_ifdef(CONFIG_USB_DEVICE_DRIVER USB_STACK_USE_DEDICATED_RAM=1)
-
-if(CONFIG_FLASH_MCUX_FLEXSPI_XIP)
-  zephyr_code_relocate(FILES flash_clock_setup.c LOCATION RAM)
+if(CONFIG_SOC_MIMXRT685S_CM33)
+  add_subdirectory(cm33)
 endif()
-
-set(SOC_LINKER_SCRIPT ${ZEPHYR_BASE}/include/zephyr/arch/arm/cortex_m/scripts/linker.ld CACHE INTERNAL "")
diff --git a/soc/nxp/imxrt/imxrt6xx/cm33/CMakeLists.txt b/soc/nxp/imxrt/imxrt6xx/cm33/CMakeLists.txt
new file mode 100644
index 00000000000..7ed2c42c708
--- /dev/null
+++ b/soc/nxp/imxrt/imxrt6xx/cm33/CMakeLists.txt
@@ -0,0 +1,26 @@
+#
+# Copyright (c) 2020, NXP
+#
+# SPDX-License-Identifier: Apache-2.0
+#
+
+zephyr_include_directories(.)
+
+zephyr_sources(soc.c)
+
+zephyr_sources_ifdef(CONFIG_PM power.c)
+
+zephyr_sources_ifdef(CONFIG_FLASH_MCUX_FLEXSPI_XIP flash_clock_setup.c)
+
+zephyr_library_include_directories(
+  ${ZEPHYR_BASE}/kernel/include
+  ${ZEPHYR_BASE}/arch/${ARCH}/include
+  )
+
+zephyr_compile_definitions_ifdef(CONFIG_USB_DEVICE_DRIVER USB_STACK_USE_DEDICATED_RAM=1)
+
+if(CONFIG_FLASH_MCUX_FLEXSPI_XIP)
+  zephyr_code_relocate(FILES flash_clock_setup.c LOCATION RAM)
+endif()
+
+set(SOC_LINKER_SCRIPT ${ZEPHYR_BASE}/include/zephyr/arch/arm/cortex_m/scripts/linker.ld CACHE INTERNAL "")
diff --git a/soc/nxp/imxrt/imxrt6xx/flash_clock_setup.c b/soc/nxp/imxrt/imxrt6xx/cm33/flash_clock_setup.c
similarity index 100%
rename from soc/nxp/imxrt/imxrt6xx/flash_clock_setup.c
rename to soc/nxp/imxrt/imxrt6xx/cm33/flash_clock_setup.c
diff --git a/soc/nxp/imxrt/imxrt6xx/flash_clock_setup.h b/soc/nxp/imxrt/imxrt6xx/cm33/flash_clock_setup.h
similarity index 100%
rename from soc/nxp/imxrt/imxrt6xx/flash_clock_setup.h
rename to soc/nxp/imxrt/imxrt6xx/cm33/flash_clock_setup.h
diff --git a/soc/nxp/imxrt/imxrt6xx/power.c b/soc/nxp/imxrt/imxrt6xx/cm33/power.c
similarity index 100%
rename from soc/nxp/imxrt/imxrt6xx/power.c
rename to soc/nxp/imxrt/imxrt6xx/cm33/power.c
diff --git a/soc/nxp/imxrt/imxrt6xx/soc.c b/soc/nxp/imxrt/imxrt6xx/cm33/soc.c
similarity index 100%
rename from soc/nxp/imxrt/imxrt6xx/soc.c
rename to soc/nxp/imxrt/imxrt6xx/cm33/soc.c
diff --git a/soc/nxp/imxrt/imxrt6xx/soc.h b/soc/nxp/imxrt/imxrt6xx/cm33/soc.h
similarity index 100%
rename from soc/nxp/imxrt/imxrt6xx/soc.h
rename to soc/nxp/imxrt/imxrt6xx/cm33/soc.h
diff --git a/soc/nxp/imxrt/soc.yml b/soc/nxp/imxrt/soc.yml
index 319d5b947e2..82a6a35e74a 100644
--- a/soc/nxp/imxrt/soc.yml
+++ b/soc/nxp/imxrt/soc.yml
@@ -32,3 +32,5 @@ family:
   - name: imxrt6xx
     socs:
     - name: mimxrt685s
+      cpuclusters:
+      - name: cm33
diff --git a/tests/boot/test_mcuboot/testcase.yaml b/tests/boot/test_mcuboot/testcase.yaml
index 6669dc5efdb..f30581262a2 100644
--- a/tests/boot/test_mcuboot/testcase.yaml
+++ b/tests/boot/test_mcuboot/testcase.yaml
@@ -32,7 +32,7 @@ tests:
       - mimxrt1160_evk/mimxrt1166/cm7
       - mimxrt1170_evk/mimxrt1176/cm7
       - mimxrt595_evk/mimxrt595s/cm33
-      - mimxrt685_evk
+      - mimxrt685_evk/mimxrt685s/cm33
       - nrf52840dk/nrf52840
     integration_platforms:
       - frdm_k64f
diff --git a/tests/drivers/build_all/pwm/testcase.yaml b/tests/drivers/build_all/pwm/testcase.yaml
index 3bcb57b6100..6aca27aabcd 100644
--- a/tests/drivers/build_all/pwm/testcase.yaml
+++ b/tests/drivers/build_all/pwm/testcase.yaml
@@ -23,7 +23,7 @@ tests:
   drivers.pwm.mcux.build:
     platform_allow: mimxrt1064_evk
   drivers.pwm.mcux.sctimer.build:
-    platform_allow: mimxrt685_evk
+    platform_allow: mimxrt685_evk/mimxrt685s/cm33
   drivers.pwm.rv32m1.tpm.build:
     platform_allow: rv32m1_vega/openisa_rv32m1/ri5cy
   drivers.pwm.sifive.build:
diff --git a/tests/drivers/counter/counter_basic_api/testcase.yaml b/tests/drivers/counter/counter_basic_api/testcase.yaml
index 3b9098e47e2..482fc9c54eb 100644
--- a/tests/drivers/counter/counter_basic_api/testcase.yaml
+++ b/tests/drivers/counter/counter_basic_api/testcase.yaml
@@ -34,7 +34,7 @@ tests:
       - drivers
       - counter
     depends_on: counter
-    platform_allow: mimxrt685_evk
+    platform_allow: mimxrt685_evk/mimxrt685s/cm33
     timeout: 400
     extra_args:
       DTC_OVERLAY_FILE="boards/mimxrt685_evk_rtc_1khz.overlay"
diff --git a/tests/drivers/i2s/i2s_api/testcase.yaml b/tests/drivers/i2s/i2s_api/testcase.yaml
index 84a1d2bede9..b039b413585 100644
--- a/tests/drivers/i2s/i2s_api/testcase.yaml
+++ b/tests/drivers/i2s/i2s_api/testcase.yaml
@@ -7,7 +7,7 @@ tests:
     filter: not CONFIG_I2S_TEST_USE_GPIO_LOOPBACK
     platform_exclude:
       - mimxrt595_evk/mimxrt595s/cm33
-      - mimxrt685_evk
+      - mimxrt685_evk/mimxrt685s/cm33
   drivers.i2s.gpio_loopback:
     depends_on:
       - i2s
@@ -19,6 +19,6 @@ tests:
     harness: ztest
     platform_exclude:
       - mimxrt595_evk/mimxrt595s/cm33
-      - mimxrt685_evk
+      - mimxrt685_evk/mimxrt685s/cm33
     harness_config:
       fixture: gpio_loopback
diff --git a/tests/drivers/regulator/voltage/testcase.yaml b/tests/drivers/regulator/voltage/testcase.yaml
index 19dac317421..e9137c17a24 100644
--- a/tests/drivers/regulator/voltage/testcase.yaml
+++ b/tests/drivers/regulator/voltage/testcase.yaml
@@ -17,7 +17,7 @@ tests:
       fixture: npm6001_ek_to_adc
   drivers.regulator.voltage.nxp:
     platform_allow:
-      - mimxrt685_evk
+      - mimxrt685_evk/mimxrt685s/cm33
       - lpcxpresso55s36
     harness_config:
       fixture: gpio_loopback